ELECTROMIGRATION INDUCED HILLOCK DYNAMICS ON THE INTERCONNECT SURFACE

Four Fold Crystal Symmetry, {100} Planes in FCC

When the tilt angle becomes 30°, the edge-hillock at low and moderate electron wind intensities χ= 5−25 dies off gradually, with minor modification in shape such as small bending to lee side. At high intensities as illustrated in Figure the Gaussian shape hillock transforms into finger shape hillock bending towards the leeside. This bend finger shape hillock grows without any change in form, and shift rather fast towards the cathode edge, if one uses a high diffusion anisotropy coefficient such as A =10.