ELECTROMIGRATION INDUCED HILLOCK DYNAMICS ON THE INTERCONNECT SURFACE

Four Fold Crystal Symmetry, {100} Planes in FCC

The general evolution behavior of the edge-Hillock at 45° tilt angle is characterized in two regime, for low and high electron wind intensities. In both extreme cases, the first edge-hillock transforms into the sawtooth morphology, and shifts towards the cathode end. In the case of high electron winds, the multiplication in the number of saw teeth is very obvious while it is drifting steadily along the windward direction as shown in Figure.