Introduction

Theory

Experimental
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Results

Conclusions

 

 

 

 

 

 

 

 

 

© 2005 CSL

Experimental Setup: Boundary conditions for electromigration grooving, continued.

Electrostatic Boundary Conditions:

 

 

Neumann boundary conditions. A constant electric field Eo is imposed far away from the groove surface, which generates an electric field denoted by E, having zero normal component at the interfacial layer as well as the interconnect upper and lower edges.